A new environmentally friendly chiller technology for cooling processes in semiconductor manufacturing has been developed and transferred to the domestic company Chargo Engineering. The technology aims for a product launch in 2027.
According to the Korea Institute of Machinery and Materials (KIMM), a team led by Dr. Ko Jun-seok from the Carbon Neutral Machinery Research Institute has created a cryogenic cooling system capable of achieving a cooling performance of 15 kilowatts (kW) at temperatures below -120°C.
In the semiconductor fabrication process, specifically during the etching phase where fine circuits are formed on surfaces, effective heat removal is crucial. This requires supplying a cooling fluid at around -100°C. Traditional vapor compression chillers often utilize refrigerants that significantly contribute to global warming, making it challenging to scale up cooling capacities.
The research team utilized a “turbo-Brayton” method, which relies on compressing and expanding nitrogen gas to produce a cooling effect. Nitrogen, used as the refrigerant, has a Global Warming Potential (GWP) of zero. The cooling system is designed to operate safely at pressure levels below 10 atmospheres.
Key components of the chiller include a turbo machine utilizing magnetic bearing technology, which supports the rotating shaft without lubrication. This innovation addresses freezing issues with lubricants that can occur at extremely low temperatures, preventing equipment malfunction or performance degradation during high-speed rotation, which reaches up to 60,000 RPM.
The design of the cooling system has been simplified and compacted to minimize installation space in industrial settings. The industrial chiller measures 1.6 meters in width and length, and 2.1 meters in height. Performance tests have confirmed that the chiller can reach -120°C within 30 minutes of operation and successfully handle a cooling load of 15 kW within an hour, with a rated power consumption of 90 kW.
The research team noted, “This is the first time a large-capacity cryogenic chiller utilizing the turbo-Brayton method has been developed and verified for operational performance in South Korea.” The technology transfer to Chargo Engineering is expected to enable its use not just in semiconductor etching equipment but also across various industrial sectors that require substantial cryogenic cooling.
Looking ahead, the Energy Storage Research Lab plans to further develop technologies capable of cooling down to -250°C and -269°C, with aspirations for applications in superconductivity, space exploration, hydrogen energy, quantum technology, and nuclear fusion industries.
Dr. Ko emphasized the team’s commitment to continuing the development of industrial cryogenic cooling technology for semiconductor manufacturing and other promising future industries, following an initial goal set in 2024 for the development of an industrial chiller.
